Abstract

• Phase-pure perovskite type SrTiO3, CaTiO3 and BaTiO3 thin films are deposited on ITO coated glass substrate by using sol-gel process and spin-coating technique. The samples are studied by structural, morphological and electrical characteristics. The X-ray diffraction spectra of SrTiO3, CaTiO3 and BaTiO3 thin films on ITO glass shows that the perovskite type cubic structures with preferred orientation along (110) plane. The surface morphological is investigated by scanning electron microscopy (SEM), which revealed the crystalline nature of the films. The lattice parameters, unit cell volume, crystallite size, dislocation density, strain and grain size are evaluated. Mott- Schottky capacitance analysis is adapted to determine the built-in voltage (Vbi) and doping density (NA) of the perovskite thin film devices. The influence of the Schottky contact is studied for perovskite thin films devices, by using capacitance-voltage measurement at frequency 10 kHz. Furthermore, the depletion region widths of the thin films devices are also evaluated.