Abstract

• Sol-gel method was used in this study to prepare barium, calcium and tin doped strontium titanate thin films deposited onto silicon substrates by spin-coating technique. The effects of the dopant materials on the structural and capacitance properties of the films were examined by various characterization procedures. Morphological analysis of the samples was performed using scanning electron microscopy and all the films were found to be well grown and homogeneous structure. The structural modification was investigated by X-ray diffraction and the crystalline phases of the films were observed to be cubic perovskite structure. Measurements of capacitance-voltage characteristics were carried out by using LCR meter in the frequency range of 1 kHz to 100 kHz with the various applied voltages. From Mott-Schottky analysis, built in potential “Vbi”, effective dopant concentration “ND” and depletion layer width “W” of the films were also evaluated.