Abstract

• Calcium titanate and barium doped calcium titanate, Ca1-xBaxTiO3 (x = 0.1, 0.2, 0.3) thin films deposited onto silicon substrates were prepared by spin coating technique. The prepared undoped and Ba doped CaTiO3 thin films were studied by various characterization techniques aimed at understanding the structural and electrical properties of the samples. These films were characterized by a smooth surface with uniform, crack-free microstructure and densely packed, which is in agreement with the scanning electron microscopy (SEM) analysis. The effect of composition on the phase formation of these samples was investigated by recording X-ray diffraction patterns (XRD) and it was observed that the lattice parameter varied with increasing the dopant concentration of barium. The dielectric constants of all the films were determined by a capacitance-voltage measurement using a LCR meter in the frequencies range of (0.1 kHz to 100 kHz).